HIROX SH-3500 Table Top SEM (60.000x)

Resolution: 15 nm

Magnification: Max. 60,000x

Voltage: 1kv ~ 30kv (1/5/10/15/20/30)

Detection: SE (Secondary Electron)

Electron Gun: Tungsten Filament (cartridge)

Sample stage: X: 35nm, Y : 35mm, R: 360° / 3-axis (Manual)

* X,Y,R Motorized - option

* Tilt : 0~45° - option

Sample (Diameter/Height): 70mm/30mm

Vacuum System: High Vacuum

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