MKS 901P Micro Pirani-Piezo Loadlock Vacuum Transducer (NW16 ISO-KF; RS232/analog)
Manufacturer: MKS Model: 901P P/N: 901P-11030 - Contact
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Absolute Measurement Range: 1.0 x 10-5 to 1500 Torr
Differential Measurement Range: -760 to +760 Torr
Digital Communication: RS232
Type: Vacuum Transducer
Sensor: MicroPirani™ (MEMS Thermal Conductivity)and Piezo differential (MEMS diaphragm)
Display: No
Seal Material: Viton
Electrical Connector: 15-pin, High Density, D-sub male
Interface: RS232/analog
Relays: 3
Fitting Type: NW16 ISO-KF
Installation Orientation: Any
Set Point Range: Absolute: 5.0 x 10-4 Torr to 1000 Torr. Differential: -760 to 100 Torr
Calibration Gas: Air, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, Xenon, Neon
Operating Temperature: 0 - 40°C (32 - 104°F)
Maximum Bakeout Temperature: 85°C (185°F)
Analog Output: 1-9 VDC (1 VDC per Decade)
Analog Output Resolution: 16 bit
Optional Analog Output 2: 5 VDC = 0 Torr, 1 VDC/decade (Piezo Differential)
Relay Contact Rating: 1 A @ 30VAC/DC, resistive
Relay Response: 100 msec maximum
Power Requirements: 9 - 30 VDC, <1.2 Watts maximum
Exposed Materials: Silicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton
Electronic Casing and Flange: 304 stainless steel
Compliance: CE
Analog Output 2 Resolution: 12 bit
Digital Baud Rates: 4800 - 230400 Baud
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