MKS GE300A-MFM Elastomer Sealed Mass Flow Meter (150 - 300 slm)
Manufacturer: MKS Model: GE300A-MFM - Contact
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Measurement Ranges: 0.1% to 100% of Full Scale (range on mech.)
Full Scale Flow Range: 150-300 slm (N2 equivalent)
Analog Connector: 15 pin Type ‘’D’’ male
Maximum Inlet Pressure: 150 psig
Burst Pressure: 1500 psig
Typical Accuracy: ±1% of Reading
Repeatability: ±0.5% of Reading
Resolution: 0.1% of Full Scale
Zero Temperature Coefficient: <0.05% of Full Scale/°C
Span Temperature Coefficient: <0.08% of Reading/°C
Inlet Pressure Coefficient: <0.03% of Reading/psi or less
Warm-up Time: 1 hour
Operating Temperature: 10-50°C
Storage Humidity: 0 to 95% relative humidity, non-condensing
Storage Temperature: -20° to 65°C (-4° to 149° F)
Power Requirements: 15-24 VDC @ (<2 watts)
Weight: <3.4 lbs (1.54 kg)
Compliance: CE
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