MKS GM100A-MFM Metal-sealed Mass Flow Meters (50-100 slm)

Measurement Ranges: 0.1-100% of Full Scale

Full Scale Flow Range: 50-100 SLM (N2 equivalent)

Flow Input Output Signal: Voltage (0-5 VDC)

                                         Current (4-20 mA)

Analog Connector: 15 pin Type D male, 9 pin Type D male

                               15 pin Type D male

Maximum Inlet Pressure: 500 psi

Proof Pressure: 1000 psig

Burst Pressure: 1500 psig

Typical Accuracy: ±1% of Reading

Repeatability: ±0.3% of Reading

Resolution: 0.1% of Full Scale

Zero Temperature Coefficient: <0.05% of Full Scale/°C

Span Temperature Coefficient: <0.08% of Reading/°C

Inlet Pressure Coefficient: <0.02% of Reading/psi

Warm-up Time: 30 minutes

Operating Temperature: 10-50°C

Storage Humidity: 0 to 95% relative humidity, non-condensing

Storage Temperature: -20° to 80°C (-4° to 176° F)

Power Requirements: +15 to +24 VDC @ (<2 watts)

Weight: <2.5 lbs (1.1 kg)

Compliance: CE

For specific range please check the attachment below!