MKS GM50A-MFM Metal-sealed Mass Flow Meters (5 sccm-50 slm; 1.45 in. Wide)

Measurement Ranges: 0.1% to 100% of Full Scale

Full Scale Flow Range: 5-50000 sccm (N2 equivalent)

Flow Input Output Signal: Voltage (0 to 5 VDC)

                                         Current (4 to 20 mA)

Analog Connector: 15 pin Type D male

                               9 pin Type D male

                               15 pin Type D male

Maximum Inlet Pressure: 500 psi

Proof Pressure: 1000 psig

Burst Pressure: 1500 psig

Typical Accuracy: ±1% of Reading

Repeatability: ± 0.3% of Reading

Resolution: 0.1% of Full Scale

Zero Temperature Coefficient: <0.05% of Full Scale/°C

Span Temperature Coefficient: <0.08% of Reading/°C

Inlet Pressure Coefficient: <0.02% of Reading/psi

Warm-up Time: 30 minutes

Operating Temperature: 10-50°C

Storage Humidity: 0 to 95% Relative Humidity, non-condensing

Wetted Materials: 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality)

Power Requirements: +15 to +24 VDC @ (<2 watts)

Weight: <2.5 lbs (1.1 kg)

Compliance: CE

For specific range please check the attachment below!

Literature