MKS IM100A-MFM Metal-sealed Mass Flow Meters (50-100 slm)
Manufacturer: MKS Model: IM100A-MFM - Contact
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Full Scale Flow Range: 50,000-100,000 sccm (N2 equivalent)
Measurement Range: 0.1% to 100% of Full Scale
Maximum Inlet Pressure: 500 psi
Proof Pressure: 1000 psig
Burst Pressure: 1500 psig
Typical Accuracy: ±1% of Reading
Repeatability: ±0.3% of Reading
Resolution: 0.1% of Full Scale
Zero Temperature Coefficient: <0.05% of Full Scale/°C
Span Temperature Coefficient: <0.08% of Reading/°C
Inlet Pressure Coefficient: <0.02% of Reading/psi
Warm-up Time: 30 minutes
Operating Temperature: 10-50°C
Storage Humidity: 0 to 95% relative humidity, non-condensing
Storage Temperature: -20° to 80°C (-4° to 176° F)
Enclosure Rating: IP66
Power Requirements: +15 to +24 VDC @ (<2 watts)
Flow Input Output Signal: Voltage (0 to 5 VDC)
Current (4 to 20 mA)
Analog I/O Connector: 15 pin Type "D" male, 9 pin Type "D" male
Weight: <2.5 lbs (1.1kg)
Compliance: CE
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