Yamato PDC510 プラズマドライクリーナー (500W)
生産者: Yamato Model: PDC510 P/N: 215054 - 要件クオート
- 連絡先
전화번호: いい価格のため、連絡しなさい
ホットライン: (+84) 968060220
電話番号: +84 (24)62923267
Plasma Mode: RIE/DP selectable
Electrode structure: Parallel flat stage plate
Vacuum gauge: Capacitance manometer
High frequency output: Max 300W
Oscillation Frequency: 13.56MHz Quartz oscillator
Output setting method: Manual setting on LCD touch panel
Matching method: Auto tuning
Chamber size: W500×D300×H200mm
Stage size: W400×D200mm
Chamber material: Aluminum
Reaction gas: 2 systems (Argon, Oxygen)
Purge gas: Nitrogen or dry air
Reaction gas flow control: Mass flow controller
Rotary vacuum pump: Approx. 500L/min. (Provided)
External dimensions(W×D×H mm): W700×D700×H1,285mm
Weight: Approx. 180kg
Power Source: AC220V~AC 415V 3-phase with step-down transformer
- 良質な取り決め
- オリジナル保証
- 宅配便
- 買い取り簡単化