Yamato PiPi 小型プラズマ装置 (RIE)

Plasma mode: RIE (reactive ion etching)

Electrode structure: Parallel flat panel type

Electrode dimensions: W130×D130mm

Vacuum meter: Bourdon gauge

Controller: Sequencer

Matching method: Auto tuning

Internal dimensions(W×D×H mm): 230×130×100mm

External dimensions(W×D×H mm): 438×520×565mm

Power Source: 115V /220V Single phase with step-down transformer

Weight: 50kg

Details

Datasheet


  • 良質な取り決め
  • オリジナル保証
  • 宅配便
  • 買い取り簡単化