Yamato PR200 小型プラズマ装置 (200W)

System: DP mode, Barrel type

High Frequency Output: Max. 200W

Oscillation Frequency: 13.56MHz

Tuning Method: Automatic

Reaction Chamber: Pyrex Glass φ100× L160mm

Reaction Gas System: 1 system (oxygen), flow meter

Control System: Manual leakage valve

Piping Material: SUS、Teflon

External Dimensions: W350×D400× H500mm (without projection）

Accessory: Specimen stand x 1pc

Internal dimensions（φ×D mm）: φ100×160mm

External dimensions（W×D×H mm）: 350×400×500mm

Power Source: AC115V/AC220V Single phase with step-down transformer

Weight: 25kg

Datasheet