Yamato PR301 小型プラズマ装置 (300W)

System: DP mode, Barrel type

High Frequency Output: Max. 300W

Oscillation Frequency: 13.56MHz

Tuning Method: Manual biaxial

Reaction Chamber: Pyrex glass, ø118×160mm×1 chamber

Reaction Gas System: 1 system (oxygen), flow meter

Control System: Auto pressure reduction, auto leak valve

Piping Material: SUS、Teflon

Accessory: Vacuum grease×1 pc, O-ring for reaction chamber×1 pc

Internal dimensions(φ×D mm): φ118×160mm

External dimensions(W×D×H mm): 438×520×630mm

Power Source: AC115V/AC220V Single phase with step-down transformer

Weight: 34kg

Detail

Datasheet

  • 良質な取り決め
  • オリジナル保証
  • 宅配便
  • 買い取り簡単化