Yamato PR510 プラズマリアクター (500W)

System: DP mode, Barrel type

High Frequency Output: Max. 500W

Oscillation Frequency: 13.56MHz

Tuning Method: Automatic tuning

Reaction Chamber: Made of quartz, ø215×305mm

Reaction Gas System: Dual system (O2/CF4)

Control system: Automatic touch panel

Piping Material: SUS、Teflon

Gas inlet: 1/4" swagelok

Vacuum pump inlet: NW25

External dimensions: W520×D630×H760mm

Accessory: Vacuum grease×1 pc, O-ring for reaction chamber×1 pc

Power Source: AC220V~AC415V Three phase with step-down transformer

Weight: 70kg

Standard accessories:

Vacuum grease×1 pc.

O-ring for reaction chamber×1 pc.

Optional accessories:

Frame for wafers (2, 3, 4, 5 inches)

Multi-purpose angled frame

Aluminum etching tunnel (φ180 max.)

Vacuum pump (250L/min. or more)

Datasheet