MKS AX2530 SmartPower®インテリジェントマイクロ波発電機 (3kW; 2455MHz)

Maximum Plasma Power Output: 3.0 kW

Power Output: ±1.5% (from 20 - 100% of max. power)

Frequency: 2440 - 2470 MHz

Ripple: ±1% of output power

Ambient Temperature: Up to 40°C maximum

Generator to Head Distance: Up to 100 feet maximum

Microwave Connections: WR284F waveguide with CPR284F flanges

Power Requirements: 200/208 VAC ±10%, 3 phase, 50/60 Hz

Compliance: CE, ETL, Semi S2-93A, F47

Cooling: Water, 1.5 gpm, 30°C maximum @ 30 psid minimum, air

Power Supply Generator Dimensions: 7.0 x 19 x 23 in. (178 x 483 x 584 mm) (HxWxD)

Power Head Magnetron Head Dimensions: 10 x 7.62 x 14.5 in. (254 x 193.5 x 368.3mm) (HxWxD)

Remote Control: Analog, RS485, DeviceNet™