MKS ELITE-600FP-01 elite™ RFプラズマ発生器 (600W; 13.56MHz; Profibus)
生産者: MKS Model: ELITE-600FP-01 - 要件クオート
- 連絡先
전화번호: いい価格のため、連絡しなさい
ホットライン: (+84) 968060220
電話番号: +84 (24)62923267
Frequency: 13.56 MHz ±0.005%
Dynamic Power Range: 1 - 600 W
Power Output: 600 W
Output Stability: -20 dBc
Accuracy: ±2 W (1-100 W), ±2% (101W - 600W)
Input AC Power: 110 - 253 VAC, Single phase, 50Hz/60Hz
RF Connector: Type N
Interface: Profibus, RS232
Remote Digital Interface: RS-232 via DB9F
Analog Interface: 25-pin DB25F
Cooling: Air-cooled
Operating Temperature: 5 - 40°C
AC Input Connector: IEC Compliant Inlet
LED Indicators: PWR and STAT on rear panel
Watts Nominal into 1.1:1: 600 W
Watts Nominal into 1.5:1: 600 W
Watts Nominal into 2:1: 486 W
Watts Nominal into 3:1: 384 W
Watts Nominal into inf:1: 200 W
Dimensions: 2U, full rack: 17 x 15 x 3.5 inches (WxDxH)
3U, half rack: 8.5 x 15 x 5.25 inches (WxDxH)
Weight: 9.2 kg
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