MKS GHW-50 高信頼性RFプラズマ発生器 (5kW; 13.56MHz)
生産者: MKS Model: GHW-50 - 要件クオート
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- 連絡先
전화번호: いい価格のため、連絡しなさい
ホットライン: (+84) 968060220
電話番号: +84 (24)62923267
Frequency: 13.56MHz ±0.005%
Dynamic Power Range: 10 - 5000 W
Power Output: 5.0 kW
Load Impedance Range: Unlimited
RF Stability/Spurious Output: Unconditionally stable for any load within operational limits < -45dBc
Harmonic Output & Distortion: < -40dBc
Regulation Tolerance: >500 W: ±1.5% SP, <500 W: ±10.0 W
Input AC Power: 200/208 VAC, 3/PE~ (3W+G) 30 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 15 A/PHASE
RF Connector: Type N
Interface: Standard: RS-232 Subminiature Type-D 9-pin digital, optional custom interface cards available.
Rack Mountins: EIA (Standard) 19-inch adapters supplied
Cooling System: Water flow at 2.0 Gal./Min. (7.6 LPM) minimum at 5 - 35°C. Connections provided to accept 3/8 inch male (NPT) pipe thread
Dimensions: Rack Mount: 8.72 x 19 x 22.1 inches (221 x 483 x 560 mm) (HxWxD)
Weight: 91 lbs. (41.3 kg)
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