MKS NOVA-50A NOVA® RFプラズマ発生器 (5 kW; 2 MHz)
生産者: MKS Model: NOVA-50A - 要件クオート
- 連絡先
전화번호: いい価格のため、連絡しなさい
ホットライン: (+84) 968060220
電話番号: +84 (24)62923267
Frequency: 2.00 MHz ±0.005%
Dynamic Power Range: 10 - 5000 W
Power Output: 5.0 kW
Load Impedance Range: Unlimited
Harmonic Output & Distortion: <-40dBc
Regulation Tolerance: >500 W: <2.0% SP, <500 W: ±5.0 W
Input AC Power: 200/208 VAC, 3/PE~ (3W+G) 32A/PHASE
RF Connector: Type HN
Interface: Standard: RS-232 Subminiature, Type-D 9-pin digital; optional custom interface cards available.
Rack Mounting: 19-inch adapters supplied
Cooling System: Water flow at 2.0 Gal./Min. (7.6 LPM) minimum at +5°C to +35°C. Connections provided to accept 3/8" male (NPT) pipe thread.
Dimensions: 8.72" x 19" rack mount x 22.1" (221 x 483 x 560 mm.) (HxWxD) (excluding handles & connectors)
Weight: 91 lbs (41.3 kg)
Compliance: NRTL Listed: UL3111-1 (1994), CAN/CSA C22.2 No. 1010.1-92, EN61010-1:1993, A2:1995, EN50081-2: 1992, EN50082-2: 1995
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