MKS VISION-2000-B プロセスツール用真空ベースライン残留ガス分析計 (1-100; 1-200; 1-300 amu)
生産者: MKS Model: VISION-2000-B - 要件クオート
- 連絡先
전화번호: いい価格のため、連絡しなさい
ホットライン: (+84) 968060220
電話番号: +84 (24)62923267
Mass Range: Standard: 1-100 amu
Optional: 1-200 amu, 1-300 amu
Ion Source: Open ion source
Filaments: Replaceable twin Tungsten or Thoria filaments
Mass Filter: Double filter (1 inch RF only pre-filter with 4 inch main filter)
Detector: Dual (Faraday and secondary electron multiplier)
Maximum Analyzer Operating Pressure: 7.6e^-5 Torr (1e^-4 mbar)
Minimum Detectable Concentration: Faraday: 2e^-11 Torr (2.7e^-11 mbar)
Secondary electron multiplier: 5e^-14 Torr (6.7e^-14 mbar)
Mass Stability: Better than ±0.1 amu over 8 hours at stable ambient temperature
Resolution: Better than 10% valley between peaks of equal height throughout the mass range
Mounting Flange: DN35CF (70mm/2.75inch OD) Conflat® flange
Operating Temperature: Electronics: 10-40°C
Weight: Control Module: 1.7 kg
Pneumatics: 60-80 psig CDA
Power Requirements: 24 VDC, 3.4A, external supply (included), 100-120V/200-240V, 2.1 Amp, 47-63 Hz
I/O Capability: 4 analog inputs (-11 to +11v, 22 bit)
2 analog outputs (0-10V, 12 bit)
16 digital TTL I/O
1 opto-isolated filament control input
1 dedicated gauge port
Communication: Ethernet CAT-5e
Shipping Weight: 25 lbs (11.4 kg)
Type: Residual Gas Analyzer
Measurement Technique: Mass Spectrometry
Compliance: Compliant to RoHS Directive 2002/95/EC (control unit)
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