Yamato PDC510 プラズマドライクリーナー (500W)

Plasma Mode: RIE/DP selectable

Electrode structure: Parallel flat stage plate

Vacuum gauge: Capacitance manometer

High frequency output: Max 300W

Oscillation Frequency: 13.56MHz Quartz oscillator

Output setting method: Manual setting on LCD touch panel

Matching method: Auto tuning

Chamber size: W500×D300×H200mm

Stage size: W400×D200mm

Chamber material: Aluminum

Reaction gas: 2 systems (Argon, Oxygen)

Purge gas: Nitrogen or dry air

Reaction gas flow control: Mass flow controller

Rotary vacuum pump: Approx. 500L/min. (Provided)

External dimensions（W×D×H mm）: W700×D700×H1,285mm

Weight: Approx. 180kg

Power Source: AC220V~AC 415V 3-phase with step-down transformer