Yamato PR300 小型プラズマ装置 (100W×3)

System: DP mode, Barrel type

High Frequency Output: Max. 300W (100W×3 chambers)

Oscillation Frequency: 13.56MHz

Tuning Method: Manual biaxial

Reaction Chamber: Pyrex Glass ø64×160mm×3 chambers 

Reaction Gas System: 1 system (oxygen), flow meter

Control System: Auto pressure reduction, auto leak valve

Piping Material: SUS, Teflon, copper and brass

Accessory: Sample dish (large and small)×1 each, Sample shelf×1 pc, Vacuum grease×1 pc, O-ring for reaction chamber×3 pcs

Internal dimensions（φ×D mm）: -

External dimensions（W×D×H mm）: 438×520×556mm

Power Source: AC115V/AC220V Single phase with step-down transformer

Weight: 36kg