MKS IM50A 属密封质量流量控制器 (5sccm-50slm; IP66)

Full Scale Flow Range: 5 - 50000 sccm Full Scale (N2 equivalent)

Maximum Inlet Pressure: 150 psig

Normal Operating Pressure Differential: 5 to 5000 sccm: 10 to 40 psid

                                                               10000 to 20000 sccm: 15 to 40 psid

                                                               30000 to 50000 sccm: 25 to 40 psid

Proof Pressure: 1000 psig

Burst Pressure: 1500 psig

Control Range: 2% to 100% of Full Scale

Typical Accuracy: ±1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale

Repeatability: ±0.3% of Reading

Resolution: 0.1% of Full Scale

Zero Temperature Coefficient: <0.05% of Full Scale/°C

Span Temperature Coefficient: <0.08% of Reading/°C

Inlet Pressure Coefficient: <0.02% of Reading/psi

Typical Settling Time: <750 msec., typical above 5% Full Scale

Warm-up Time: 30 min

Operating Temperature: 10° to 50°C

Storage Humidity: 0 to 95% Relative Humidity, non-condensing

Storage Temperature: -20° to 80°C

Seal Material: Viton, Buna-N, Neoprene, Kalrez®, or EPDM

Wetted Materials: 316L S.S. VAR, 316 S.S., Elgiloy®, Nickel

Surface Finish: MFC: 10µ inch average Ra (electropolished)

Enclosure Rating: IP66

Power Requirements: +15 to +24 VDC @ (<4 watts)

Flow Input Output Signal: 0 to 5 VDC

Analog I/O Connector: 15-pin Type "D" male, 9-pin Type "D" Male

Weight: 3 lbs (1.4 kg)

Compliance: CE

For specific range please check the attachment below!